Micro-resonator modified as magnetic sensor
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17-06-2010, 12:44 PM

Presented By:
S.G. Lokhre, P.R. Apte, R.Raajeev* and R. Lal*

Solid State Electronics Group
Tata Institute of Fundamental Research
Homi Bhabha Road
Colaba, BOMBAY - 400 005, India


Balanced doubly suspended structure has been used earlier for very precise high Q resonators. But here we have used the unbalanced half section which is sputter deposited with a magnetic film. The central axis acts like a torsion wire of about a micron width and thickness. The outer arm deflects downwards about the torsion axis when subjected to a magnetic field from beneath the sample. The deflection is measured by the reflected light presently under an optical microscope but can also be done by reflecting a laser beam as done in AFMs. The bending angle -versus- magnetic field is quite linear.

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