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seminar surveyer
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Joined: Sep 2010
18-10-2010, 10:27 AM

Martin, Nogues, Liu, Vicent, Schuller, JMMM, 256, 449 (2003).



I. Basic lithography processes
II. Types of lithography

Hard Bake

Stabilize the developed resist for subsequent processes
Can make removal very difficult
Remove residual solvent
Not necessary for lift-off
Temperature/time can change the profile

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